Original Papers, Reviews, Articles and International Conferences (Positioning Systems)

  1. レーザを用いたリソグラフィ用マスクアライナの開発
    愛知工業大学研究報告、 第33号B, (1998).
    周礼中、劉京南、古橋秀夫、内田悦行

  2. Precision Angular Alignment using Moire Signals
    2nd China-Japan Symposium on Mechatronics, CJM, Sep. 1997 Chengdu China. No. B9, Proceedings, pp.203-208 (1997).
    Jingnan Liu, Hideo Furuhashi, Akihiro Torii, Akiteru Ueda, Niichi Hayashi, Jun Yamada and Yoshiyuki Uchida

  3. Automatic Angular Positioning using Moire Signals
    International Conference on Micromechatronics for Information and Precision Equipment, MIPE'97, The Japan Society of Mechanical Engineers JSME Centennial Grand Congress, July 1997 Japan. No. PE-11, Proceedings, No.97-207, pp.215-220 (1997).
    Akihiro Torii, Lizhong Zhou, Jingnan Liu, Hideo Furuhashi, Akiteru Ueda, Yoshiyuki Uchida and V. T. Chitnis

  4. Fully automayic computer controlled mask alignment using moire technique
    APIS/IMAC'96 (The 3rd Asian/Pacific International Symposium on Instrumation Measurement and Automatic Control), Aug. 20-23, 1996 China.
    Proceedings pp.211-217 (1996).
    J. Liu, B. P. Singh, H. Furuhashi, N. Hayashi, J. Yamada, V. T. Chitnis and Y. Uchida

  5. Automatic angular alignment in mask aligner using computer controlled moire technique
    IECON(1996 International Conference on Industrial Electronics, Control, and Instrumentation) Aug. 5-9, 1996 Taiwan.
    Proceedings of the Symposium pp. 1318-1321 (1996).
    H. Furuhashi, N. Hayashi, S. Watanabe, S. Higa, Y. Uchida, B. P. Singh and K. Kashyap

  6. 回折モアレ光を用いた超精密位置決め技法とその精度
    電気学会論文誌C、Vol. 116C、No.1. 75-80 (1996).
    劉京南、古橋秀夫、植田明照、山田淳、内田悦行

  7. Precision position control systems using moire signals
    IECON(1995 International Conference on Industrial Electronics, Control, and Instrumentation) Nov. 6-10, 1995 USA.
    Proceedings of the Symposium pp. 968-972 (1995).
    J. Liu, H. Furuhashi, A. Torii, N. Hayashi, J. Yamada, Y. Uchida, A. K. Kanjilal and V. T. Chitnis

  8. Automatic mask alignment in the q direction using moire sensors
    Nanotechnology, Vol. 6, No. 4. 135-138 (1995).
    J. Liu, H. Furuhashi, A. Torii, R. Sharma, V. T. Chitnis, B. P. Singh, J. Yamada and Y. Uchida

  9. Precise open-loop positioning using LPM with error correction
    KACC (International Sessions '95 Korean Automatic Control Conference) Oct. 23-25, 1995 Korea.
    Proceedings of the 1995 KACC, International sessions, pp.211-214. No.IS-12 (1995).
    H. Furuhashi, H. Shingu, N. Hayashi, S. Watanabe, T. Sumi, Y. Uchida

  10. Automatic mask alignment in the q direction using moire sensors
    The 4th Biennial Joint Warwick/Tokyo Nanotechnology Symposium, Sep. 19-23, 1994 UK.
    Proceedings of the Symposium, Session of Manipulation. pp.16-18 (1994).
    Y. Uchida, H. Furuhashi, J. Liu, A. Torii, J. Yamada and V. T. Chitnis

  11. Development of Aerodynamic Stepping Motor
    3rd World Conference on Experimental Heat Transfer, Fluid Mechanics and Thermodynamics, Nov. 5, 1993 Honolulu, Hawai, USA
    Proceedings Vol.2 pp.1735-1737 (1993).
    Yoshiyuki Uchida, Hideo Furuhashi, Akira Nobe, Jun Yamada, Takamitsu Ohashima, Niichi Hayashi, Shigeo Watanabe and Seiichiro Kimura

  12. An automatic mask alignment system using moire sensors
    KACC (International Sessions '93 Korean Automatic Control Conference) Oct. 22, 1993 Seoul, Korea.
    Proceedings of the 1993 KACC, International sessions, pp. 545 -549. No.IS23.
    Hideo Furuhashi, Yoshiyuki Uchida, Asao Ohashi, Sigeo Watanabe and Jun Yamada

  13. Computer controlled positioning system for electromagnetic linear motor
    The Second Asian/Pacific International Symposium on Instrumentation, Measurement and Automatic Control, Aug. 23- 26, 1993, Xi'an, China
    Yoshiyuki Uchida, Hiroyasu Shingu, Tetsuo Sumi, Shigemitsu Nohira, Hideo Furuhashi, Jun Yamada, Jinwang Zhang and Lizhong Zhou

  14. A closed loop positioning system of a dual-axis linear motor
    Bulletin of Aichi Institute of Technology, 28B, 175-177 (1993)
    Hiroyasu Shingu, Tetsuo Sumi, Shigemits Nohira, Hideo Furuhashi, Yoshiyuki Uchida, Jun Yamada